Horizontal thermal processing
IDB Technologies works with MRL Industries Inc, part of Sandvik, to supply a range of very flexible laboratory scale horizontal furnaces, that offer flexibility as well as cost effective running due to ther compact scale.
The Minimax offers processing up to 1200C and fast ramping with various levels of process control. Typical processes include oxidation, annealing, and LPCVD. Wafer sizes up to 200 mm are available.
Fully integrated systems are also available based on the Minimax design and Black Max element technology for small scale manufacturing applications up to 300mm
